With a resolution of 0.75 μm, cycle times of less than 20 s can be achieved, depending on the component size.
By exclusively using cleanroom-compatible components, the system can be used directly as an end-of-line test in the cleanroom.
Automatic Z-tracking ensures reliable testing of complex test pieces. The use of recipe databases allows the system to be flexibly adapted for different test specimens.
The extreme light intensity of the high-speed camera delivers repeatable and reliable images of a wide variety of test objects and can be adjusted according to requirements.
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